PS-6/PS-6N 半导体特气检测探头产品介绍
【中文版】
PS-6/PS-6N系列半导体特气检测探头是专为集成电路、光伏和精密电子制造领域设计的高精度气体监测设备。该系列产品采用创新的传感技术，可对半导体工艺环境中多种特殊气体（如SiH4、PH3、AsH3等）进行实时浓度监测，助力企业实现安全生产与工艺质量的双重保障。
核心技术方面，PS-6/PS-6N搭载自主研发的多参数补偿算法，通过温度、湿度及压力数据的动态校准，显著提升了检测结果的准确性。其模块化结构设计支持快速维护与部件更换，配合IP65防护等级的工业外壳，确保设备在复杂工况下的长期稳定运行。探头响应时间小于3秒，检测分辨率达到0.1ppm级别，可精准捕捉微量化合物的浓度波动。
产品配备智能自检系统，可实时监测传感器状态并提示维护周期，有效延长核心元件的使用寿命。标准化的模拟/数字信号输出接口支持与主流DCS、PLC系统无缝对接，多种安装方式适配不同规格的气体管路布局。特别开发的抗交叉干扰算法，有效避免混合气体环境下的误报风险。
PS-6N型号在基础版PS-6的功能上进行了升级优化，增强了对超低浓度气体的检测灵敏度，同时将工作温度范围扩展至-20℃~60℃，满足更严苛的工业场景需求。全系列产品采用耐腐蚀材质打造，适用于刻蚀、沉积、离子注入等关键制程环节的在线监测。
【English Version】
The PS-6/PS-6N Semiconductor Specialty Gas Detection Probe is a high-precision monitoring solution specifically engineered for IC manufacturing, photovoltaic production, and advanced electronics fabrication. This series employs innovative sensing technology to perform real-time concentration monitoring of various process gases (including SiH4, PH3, AsH3, etc.) in semiconductor manufacturing environments, supporting both operational safety and process optimization.
Featuring proprietary multi-parameter compensation algorithms, the PS-6/PS-6N dynamically calibrates detection data based on temperature, humidity, and pressure variations, achieving remarkable measurement accuracy. Its modular architecture enables swift maintenance and component replacement, while the IP65-rated industrial housing guarantees reliable performance in challenging operating conditions. With a response time under 3 seconds and 0.1ppm-level resolution, the probe excels at detecting subtle concentration fluctuations of trace compounds.
The integrated self-diagnostic system continuously monitors sensor health and provides maintenance alerts, effectively extending core component lifespan. Standardized analog/digital output interfaces ensure seamless integration with mainstream DCS and PLC systems, complemented by multiple installation options for diverse gas pipeline configurations. The specially developed anti-cross-interference algorithm significantly reduces false alarms in complex gas mixtures.
The PS-6N variant enhances the base PS-6 model with improved sensitivity for ultra-low concentration detection and an extended operating temperature range (-20℃ to 60℃), catering to more demanding industrial applications. Constructed with corrosion-resistant materials, the entire series proves ideal for in-line monitoring during critical processes such as etching, deposition, and ion implantation.
Both models deliver continuous 24/7 monitoring capability through low-power consumption design, with optional remote data transmission modules enabling centralized gas management across multiple production lines. Customizable alarm thresholds and multi-level warning outputs provide flexible safety parameter configuration for different process requirements.
